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Research

Research Interests

Meso lab

Novel fabrication routes for one dimensional nanomaterials

We have developed a new and simple method for in-situ controlling growth direction of carbon nanotubes (CNTs) on cantilevers using plasma enhanced chemical vapor deposition (PECVD). By adjusting the flow ratio of the feed gases during CNT growth, the degree of cantilever bending can be controlled due to the change in the plasma-induced surface stress, and in doing so manipulating the electric field line direction, as well as the growth direction of CNTs. This fabrication process is amenable for integration into conventional semiconductor process for large scale fabrication of many bend CNTs on multiple cantilevers in one CVD run, and also can provide a good control of the CNT length, orientation and location. 

Meso Lab by I-Chen Chen

The development of integration of semiconductor nanostructures on flexible or low-cost substrates (e.g., polymer foils) has been extensively researched in recent years. Therefore, there is great interest in the low-temperature growth of semiconductor nanostructures. We have demonstrated a novel plasma-assisted process for vapor-liquid-solid (VLS) growth of germanium nanorods (Ge-NRs) below 200 °C with indium nanocrystals as the seed particles.

meso lab nanomaterials

Nano/microscale energy-harvesting technology of future solar cells

Doping behavior in Si nanocrystals embedded in a dielectric matrix

meso lab solar cells

Plasmonic nanostrutures for solar cell applications

Meso Lab by I-Chen Chen

Process development for optoelectronic devices

Highly reflective, low contact resistance Ohmic contacts

Meso Lab by I-Chen Chen
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