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Publications

SCI Journal Papers

  • Y.-C. Wang and I.-C. Chen*, “Low-temperature plasma-assisted growth of germanium nanorods”, CrystEngComm 16, 2937-2943 (2014).

  • T.-H. Chang, C. Chang, Y.-H. Chu, C.-C. Lee, J.-Y. Chang, I.-C. Chen, T. Li, “Low temperature growth of highly conductive boron-doped germanium thin films by electron cyclotron resonance chemical vapor deposition”, Thin Solid Films 551,53-56 (2014).

  • P.-J. Wu, Y.-C. Wang and I.-C. Chen*, “Fabrication of Si heterojunction solar cells using p-doped Si nanocrystals embedded in SiNx films as emitters”, Nanoscale Research Letters, 8, 457 (2013).

  • T.-H. Chang, J.-Y. Chang, Y.-H. Chu, C.-C. Lee, I.-C. Chen, T. Li, “Investigation of the amorphous to microcrystalline phase transition of thin film prepared by electron cyclotron resonance chemical vapor deposition method”, Surface & Coatings Technology, 231 604–607 (2013)

  • I.-C. Chen*, Y.-H. Chen, Y.-C. Wang, M.-H. Shih, “Plasmon resonance properties of silver-patterned glass substrates fabricated by anodic alumina oxide templates”, Appl. Phys. A  112 381-386 (2013)

  • I-.C. Chen*, B.-Y. Cheng, W.-C. Ke, C.-H. Kuo, L.C. Chang, ”Improved light reflectance and thermal stability of Ag-based ohmic contacts on p-type GaN with La additive”, Superlattice Microstruct. 57 51-57 (2013)

  • P.-J. Wu, Y.-C. Wang and I.-C. Chen*, “Influence of phosphorous doping on silicon nanocrystal formation in silicon-rich silicon nitride films”, J. Phys. D: Appl. Phys. 46 125104 (2013)

  • W.-C. Ke, S.-R. Jian, I.-C. Chen, J. S.-C. Jang, W.-K. Chen, J.-Y. Juang, “Influence of Mg-containing precursor flow rate on the structural, electrical and mechanical properties of Mg-doped GaN thin films”, Mater. Chem. Phys. 136 796-801 (2012)

  • I.-C. Chen*, P.-J. Wu, P.-Y. Lin, Y.-C. Wang and Y.-H. Chen, “Growth of bent carbon nanotubes by in-situ control of cantilever bending”, Carbon 49 2760 (2011).

  • I.-C. Chen*, Y.-D. Chen, C.-C. Hsieh, C.-H. Kuo and L. C. Chang, “Highly reflective Ag/La bilayer ohmic contacts to p-type GaN”, J. Electrochem. Soc. 158 H285 (2011)

EI Journal Papers

  • Y.L. Hsieh, S.Y. Chang, Tomi T. Li, L.C. Hu, C.C. Lee, J.Y. Chang, I.C. Chen*, Y.H. Chu, J.Y. Lee, S.H. Wang, “Optical emission spectroscopy studies in ECR plasma used for the deposition of silicon oxide film”, ECS Transactions, 52, 473-481 (2013).

  • B.-Y. Cheng,  I.-C. Chen*, C.-H. Kuo, L.-C. Chang, “High Reflectance Contacts to P-type GaN Using Ag-La Alloys”, ECS Transactions, 44, 1291-1294 (2012).

  • P.-J. Wu, I.-C. Chen*, C.-C. Lee, J.-Y. Chang, T. T. Li, C.-C. Su, “Effects of Microwave Power on Thermal Annealing Behaviors of Hydrogenated Amorphous Silicon", ECS Transactions, Vol. 33 65-69 (2011).

  • C.-C. Lee, J.-Y. Chang, Y.-H. Chu, C.-M. Lien, I.-C. Chen, T. Li, “Hydrogenated silicon thin film and solar cell prepared by electron cyclotron resonance chemical vapor deposition method”, ECS Transactions, 34, 1103-1108 (2011).

  • H.F. Chiu, Y.S. Chang, J.Y. Wu, Y.S. Li, J.Y. Chang, C.C. Lee, I.C. Chen , C.C. Su, Tomi T. Li, “Very High Deposition Rate of a-Si:H Thin Films by ECRCVD", ECS Transactions, 34, 1165-1171 (2011).

  • L.C. Hu, Y.P. Chen, J.Y. Chang, J.J. Lee, I.C. Chen, Tomi T. Li, “Improvements on the Uniformity of a-Si Solar Thin Films by Using Auxiliary Magnetic Field", ECS Transactions, 34, 1097-1101, (2011).

  • P.-Y. Lin, P.-J. Wu and I.-C. Chen*, “Rapid thermal annealing of amorphous silicon thin films grown by electron cyclotron resonance chemical vapor deposition”, Materials Research Society Symposium Proceedings, 1245, 105-109 (2010).

Conference Proceedings

  • Yu-Cian Wang, Ping-Jung Wu, I-Chen Chen, Chien-Chieh Lee, Jenq-Yang Chang, and Tomi Li, “Crystallization Behavior of Phosphorus-doped Silicon-rich Silicon Nitride Films Grown by Electron Cyclotron Resonance Chemical Vapor Deposition”, 26th International Microprocesses and Nanotechnology Conference (MNC 2013), November 5-8, 2013, Hokkaido, Japan.

  • Yu-Cian Wang, Ping-Jung Wu, Shu-Hui Yang, I-Chen Chen, Chien-Chieh Lee, Jenq-Yang Chang, and Tomi Li, “Influence of phosphorous doping on silicon nanocrystals in silicon-rich silicon oxide films grown by electron cyclotron resonance chemical vapor deposition”, International thin film conference, October 5-9, 2013, Taipei, Taiwan.

  • Chien-An Lin, I-Chen Chen , Ta-Ming Kuan and Cheng-Yeh Yu,“Characterization of multilayered SiOxNy:H/SiCxNy:H antireflection coatings by electron cyclotron resonance chemical vapor deposition”, The 12th international symposium on sputtering and plasma processing, July 10-12, 2013, Kyoto, Japan.

  • Chih -Yao Chen and I-Chen Chen, “Prevention of burning phenomenon in fabrication of anodic aluminum oxide membranes using a constant current method”, MRS Spring 2013 Meeting, Apr. 1-5, 2013, San Francisco, US.

  • Yu-cian Wang, Ping-Jung Wu, Pei-Yi Lin, I-Chen Chen, "Solid-phase crystallization of hydrogenated amorphous silicon films grown by electron cyclotron resonance chemical vapor deposition", The 6th International Conference on Technological Advances of Thin Films & Surface Coating, 2012, Singapore, Singapore.

  • Ping-Jung Wu, I-Chen Chen, Chien-Chieh Lee, Jenq-Yang Chang, Tomi T. Li, Chiung-Chieh Su, "Characterizations of nanostructured thin film composed of phosphorus-doped Si nanocrystals embedded in silicon nitride matrix", The 6th International Conference on Technological Advances of Thin Films & Surface Coating, Singapore, July 14-17, 2012, Kyoto, Japan.

  • Yen-Ho Chu, Teng-Hsiang Chang, Chien-Chieh Lee, Jenq-Yang Chang, I-Chen Chen, Tomi Li, "Hydrogenated Amorphous Silicon Thin Films as Passivation Layer Fabricated by Electron Cyclotron Resonance CVD for Heterojunction Solar Cell", The 6th International Conference on Technological Advances of Thin Films & Surface Coating, , July 14-17, 2012, Singapore, Singapore.

  • B.-Y. Cheng, I.-C. Chen, C.-H. Kuo and L.-C. Chang, “High Reflectance Contacts to P-type GaN Using Ag-La Alloys”, China Semiconductor Technology International Conference 2012, March 18-19, 2012, Shanghai, China.

  • P.-J. Wu, I-C. Chen, “Influence of dopant type on crystallization behavior of silicon quantum dots in silicon nitride matrix”, 21st International Photovoltaic Science and Engineering Conference, Nov 28 - Dec 2, 2011, Fukuoka, Japan.

  • Yen-Hsun Chen, Meng-Hong Shih, Canggih S. Budi, I-Chen Chen, “Effect of electropolishing pretreatment on the morphology of the anodic aluminum oxide membrane”, IUMRS International Conference in Asia (IUMRS-ICA), Sep. 19-22, 2011, Taipei, Taiwan.

  • Y. C. Wang, P. J. Wu, C. C. Hsieh, I-C. Chen, “Stress and crystallization of hydrogenated amorphous silicon films grown by electron cyclotron resonance chemical vapor deposition”, Proceedings of 11th International Symposium on Sputtering and Plasma Processes, July 6-8, 2011, Kyoto, Japan.

  • P.-J. Wu, Y.-C. Wang, I-C. Chen, “Effect of Si/N composition on Si segregation and crystallization in silicon rich nitride by inductively coupled plasma chemical vapor deposition”, Proceedings of 11th International Symposium on Sputtering and Plasma Processes, July 6-8, 2011, Kyoto, Japan.

  • S.-H. Yang, Y.-C. Wang, P.-J. Wu, I-C. Chen, “Fabrication of phosphorous-doped silicon nanocrystals by thermal oxidation of hydrogenated amorphous silicon films”, Proceedings of 11th International Symposium on Sputtering and Plasma Processes, July 6-8, 2011, Kyoto, Japan.

  • C.-C. Lee, J.-Y. Chang, Y.-H. Chu, C.-M. Lien, I-C. Chen, T. Li, “The growth control of hydrogenated amorphous silicon thin film prepared by electron cyclotron resonance chemical vapor deposition”, Proceedings of 11th International Symposium on Sputtering and Plasma Processes, July 6-8, 2011, Kyoto, Japan.

  • H.F. Chiu, Y.S. Chang, J.Y. Wu, Y.S. Li, J.Y. Chang, C.C. Lee, I.C. Chen , C.C. Su, Tomi T. Li, “Very High Deposition Rate of a-Si:H Thin Films by ECRCVD", China Semiconductor Technology International Conference 2011 (CSTIC 2011), March 13 - March 14, 2011, Shanghai, China.

  • L.C. Hu, Y.P. Chen, J.Y. Chang, J.J. Lee, I.C. Chen, Tomi T. Li, “Improvements on the Uniformity of a-Si Solar Thin Films by Using Auxiliary Magnetic Field", China Semiconductor Technology International Conference 2011 (CSTIC 2011), March 13 - March 14, 2011, Shanghai, China.

  • C.-C. Lee, J.-Y. Chang, Y.-H. Chu, C.-M. Lien, I.-C. Chen and T. T. Li “Hydrogenated silicon thin film and solar cell prepared by electron cyclotron resonance chemical vapor deposition method”, China Semiconductor Technology International Conference 2011 (CSTIC 2011), March 13 - March 14, 2011, Shanghai, China.

  • Ping-Jung Wu, I-Chen Chen, Chien-Chieh Lee, Jenq-Yang Chang, Tomi T. Li, Chiung-Chieh Su, “Effects of Microwave Power on Thermal Annealing Behaviors of Hydrogenated Amorphous Silicon", 218th ECS Meeting, Oct. 10-15, 2010, Las Vegas, US.

  • P.-Y. Lin, P. J. Wu and I.-C. Chen, “Rapid thermal annealing of amorphous silicon thin films grown by electron cyclotron resonance chemical vapor deposition”, MRS Spring 2010 Meeting, Apr. 5-9, 2010. San Francisco, US.

  • T.-T. Li, I.-C. Chen and J.-Y. Chang, “Thermal annealing study on a-Si, nc-Si and μc-Si solar thin films grown by electron cyclotron resonance chemical vapor deposition”, Proceedings of 10th International Symposium on Sputtering and Plasma Processes, July 8-10, 2009, Kanazawa, Japan.

 

Patents

  • S. Jin, L.-H. Chen and I.-C. Chen, “Probe System Comprising an Electric-Field-Aligned Probe Tip and Method for Fabricating the Same ”, US7,735,147B2 (2010).

  • 陳一塵, "半導體光電元件之高反射性接觸電極及其製作方法",中華民國專利, 專利證書號I442607 (2014).

Book Chapter

  • Jason Hafner, Edin (I-Chen) Chen, Ratnesh Lal, Sungho Jin, “General and special probes in scanning microscopies”, Springer Handbook of Nanotechnology  pp. 619-633 (2010)

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